INFICON UL1000 FAB

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INFICON UL1000 FAB – ULTRATEST™ SENSOR TECHNOLOGY

The INFICON UL1000 Fab Helium Leak Detector is best choice in economic helium vacuum leak testing industrial or semiconductor environments.

The UL 1000 FAB is equipped with advanced dry pumping technology, which helps the device filter out residues, test part and process compounds or carbon hydrogen particles. In addition, the instrument is upgraded with a maximum detection rate of 10-12 mbar*l/s with short processing speed and response time. Continuous leak testing can be done in the background at least two decades lower thanks to the IZero feature.

The “Dry” Standard for Vacuum Leak Testing in Industrial Vacuum and Semiconductor Manufacturing

ADVANTAGES

  • The smallest leaks can be detected through pump down and response time
  • The IZero function saves users from having to repeat the test many times
  • Make it simple to enter maintenance locations with little room by using a design that is nimble
  • Low total cost of ownership (TCO) made possible by a reliable two hot filament ion source with a three-year guarantee and a counterflow vacuum system.
  • Very simple to use with a rotating display, leak notification that is both visible and audible, and an optional remote control
  • Minimal maintenance thanks to an automatic calibration method and a built-in test leak

TYPICAL APPLICATIONS

  • Manufacturing industrial vacuum equipment with high requirements for cleanliness
  • Vacuum components or sub-assemblies before they are installed on existing tools
  • Maintenance work on vacuum instruments, with or without assistance from their own pumps
  • Check and install gas treatment system
  • Manufacture of semiconductors, flat panels or solar cell

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Specification

Min. detectable leak rate for Helium (Vacuum mode) mbar•L/s < 5 • 10-12
Min. detectable leak rate for Helium (Sniffer mode) mbar•L/s < 5·10-8
Max. Inlet pressure GROSS mode mbar 15
Max. Inlet pressure FINE mode mbar 2
Max. Inlet pressure ULTRA mode mbar 0.4
Pumping speed during evacuation m³/h 25 at 50 Hz
Helium pumping speed ULTRA mode L/s 2.5
Detectable masses 2,3,4 amu
Mass spectrometer Sector field 180°
Filaments ion source Iridium/Yttria coated 2
Calibrated built-in leak mbar•L/s ∼ 10-7
Test port DN 25 KF 1
Adjustable triggers 2
Interface RS 232
Chart recorder output V 2 x10
In/Outputs PLC compatible
Permissable ambient temperature (during operation) °C +10 to +40
Weight kg
lb
110
242
Dimensions (l x w x h) mm
in.
1050 x 472 x 987
41 x 19 x 39
Supply voltage (EU) V (ac) 230 (± 10 %) 50 Hz
Supply voltage (US) V (ac) 100/115 V (± 10 %) 50/60 Hz
Power consumption (typ.) VA 1100
Power consumption (max.) VA 1100

Part Number

550-100A UL1000 Fab, 230 V AC, EU plug
550-101A UL1000 Fab, 100/115 V AC, US plug

Accessories

14022 Extension cable for remote control RC1000, 8 m length
551-000 Toolbox, detachable,for UL1000
551-001 Helium Bottle Holder for UL1000/5000
551-002 ESD Mat for UL1000/5000
551-005 TC1000Test Chamber,DN25KF,ESD wrist band
551-010 Remote Control RC1000C, wired, with 4m coiled cable
551-015 Remote Control RC1000WL, wireless, incl. wireless transmitter
551-020 Wireless transmitter for RC1000WL

 

RC1000 Remote Control RC1000 Remote Control
TC1000 Test Chamber TC1000 Test Chamber

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