Inficon PSG500 – Vacuum Probe Pirani

The Inficon Pirani PSG500 vacuum probe uses the most advanced Pirani technology on the market.

With sensor components made from stainless steel, compact design for use in semiconductor systems and vacuum systems such as PVD plating, vacuum casting…

Direct replacement for TTR-91 / TTR-96 series Leybold vacuum gauge

Specifications of Inficon PSG500

Measuring range: 5 x 10-4 … 1000 mbar

Accuracy (N2)

1 x 10-3 … 100 mbar : ± 15% of reading

5 x 10-4 … 1 x 10-3 mbar: ±50% of reading

100 … 1000 mbar: ±50% of reading

Repeatability (Air)

1 x 10-3 … 100 mbar : ± 2% of reading

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