INFCON UL3000 FAB

The INFICON UL3000 Fab is designed specially for helium leak testing in semiconductor applications. The instrument is attached the innovated ULTRATEST™ sensor technology. It provides flexibility, mobility, fast start up, high sensitivity, fast and precise test results, and reliability in helium testing.

Advantages

• Save Time with I·CAL software algorithm for fast measurements in the range of 10^-9 to 10^-12 mbar·l/s
• Minimize helium leak test efforts through quick evacuation and response time
• Time saved by easy maneuverability through slim design
• Low total cost of ownership (TCO) enabled by robust ion source (3 year warranty) and counterflow vacuum system
• Easy to use, operator-guided HMI with full color high resolution rotatable display

Typical Applcation

• Semiconductor Fabs
• Flat Panel Display manufacturing
• Solar Cell fabrication
• Glass and Web (roll to roll) coating
• General vacuum coating & applications

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HystrongICL is a leading distributor of INFICON instruments in Vietnam, with an experienced technical team

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