INFICON UL3000 Fab

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INFCON UL3000 FAB

Helium Leak Dectector

The INFICON UL3000 Fab is designed specially for helium leak testing in semiconductor applications. The instrument is attached the innovated ULTRATEST™ sensor technology. It provides flexibility, mobility, fast start up, high sensitivity, fast and precise test results, and reliability in helium testing.

Advantages

  • Save Time with I·CAL software algorithm for fast measurements in the range of 10-9 to 10-12 mbar·l/s
  • Minimize helium leak test efforts through quick evacuation and response time
  • Time saved by easy maneuverability through slim design
  • Low total cost of ownership (TCO) enabled by robust ion source (3 year warranty) and counterflow vacuum system
  • Easy to use, operator-guided HMI with full color high resolution rotatable display

Typical Applcation

  • Semiconductor Fabs
  • Flat Panel Display manufacturing
  • Solar Cell fabrication
  • Glass and Web (roll to roll) coating
  • General vacuum coating & applications

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Specification

UL3000 Fab

Max. pumping speed of roughing pump m³/h >30
Helium pumping speed (high sensitive mode ULTRA) L/s 4
Dimensions (LxWxH) mm
in.
1050x472x987
42x21x34
Additional Features Roots dry pump with highest air pumping speed, HYDRO·S, separate sniffer line port for SL3000, vacuum hose holder

UL3000 Fab ULTRA

Max. pumping speed of roughing pump m³/h >36
Helium pumping speed (high sensitive mode ULTRA) L/s 4
Dimensions (LxWxH) mm
in.
1050x472x987
42x21x34
Additional Features Roots dry pump with highest air pumping speed, HYDRO·S, separate sniffer line port for SL3000, vacuum hose holder

Part Number

Part Number Description
550-260 UL3000 Fab ULTRA
550-200 UL3000 Fab

Accessories

Part Number Description
551-010 Remote Control RC1000C, wired, with 4m coiled cable
551-202 Vaccuum Hose Holder for UL3000 Fab (incl. for ULTRA version)
525-001 SL3000-3, sniffer line 3 m length
525-002 SL3000-5, sniffer line 5 m length
525-003 SL3000-10, sniffer line 10 m length
551-203 Bracket for SL3000
551-210 SL200, Sniffer line + el. extension for UL3000
551-201 Helium Bottle Holder
560-310 I/O 1000 module
560-315 BM1000 Profibus module
560-316 BM1000 PROFINET IO module
560-317 BM1000 DeviceNet module
560-318 BM1000 Ethernet/IP module
560-334 Data Cable for IO1000,BM1000, 0.5m
560-332 Data Cable 2 m
560-335 Data Cable 5 m
560-340 Data Cable 10 m
551-005 TC1000Test Chamber,DN25KF,ESD wrist band
551-205 extension cable for TC1000/SL200, UL3000

Consumables

Part Number Description
200007656 Airfilter Kit UL3 Housing Ventilation

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