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INFICON PEG100 – Penning Vacuum Probe

The Inficon PEG100 belongs to Inficon’s wide range of vacuum gauges. Measurement operation with medium to super high vacuum levels. Direct replacement for PENNINGVAC PTR 225 and PTR 237 series (Leybold).

Advantages of PEG100

  • Measuring range ranges from 1 x 10 -9 to 1 x 10 -2 mbar (7.5 x 10 -10 to 7.5 x 10 -3 Torr)
  • All-metal cold cathode sensor (Penning) with ceramic piercing connector
  • High voltage drop after plasma ignition and titanium cathode plate reduces the risk of contamination, even during radioactive operations with argon
  • Titanium anode and cathode rings can be cleaned or replaced easily
  • Fieldbus interface (DeviceNet) for easy integration into systems

Application PEG100 Inficon

  • High vacuum pressure monitoring
  • Evaporation and radiation systems
  • Measure and control general vacuum in the medium and high vacuum range

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Specifications PEG 100 Inficon

Measurement interval mbar 1 x 10-9 to 1 x 10-2
Torr 7.5 x 10-10 to 7.5 x 10-3
10-8 to 10-4 mbar % of reading ±30
Pressure, max. (absolute) bar 10
During Operation (Ambient) °C +10 to +50
Storage °C -20 to +75
Bakeout without electronics °C 350
Bakeout with electronics, at flange °C 70
Voltage V (dc) 14.5 to 36
Consumption, max w <2
Output analog signal
Output signal V 0 to 10.6
Output signal V 0.66 to 10
Compatible voltage/pressure volts per decade 1.333
Connector Connector FCC 68, female, 8 pin (shielded)
max. (analog) m (ft.) 100 (330)
Materials exposed to vacuum Stainless steel, CrNi, AI2O3, NiFe, Mo, Cu, Ni, Ti
Internal volume cm³ (in.³) 21 (1.28)
Machine weight, approx. g 500
Sealed standard IP40
type of device generic
Horizontal data transfer capability no
I / O peer to peer messaging no
Consistency value of configuration no
Ability to recover error button no
Baud rate kBaud 125 / 250 / 500
Master / Scanner  


I / 0 slave messaging: Bit Strobe yes
I / 0 slave messaging: Polling yes
I / 0 slave messaging: Cyclic yes
I / 0 slave messaging: Change of State (COS) yes
Supply for DeviceNet™ V (dc) 11 to 25
Connector connector for DeviceNet™ Phoenix Combicon, 5 battery


Part Numbers

Part Number Description
351-000 PEG100 DN 25 ISO-KF
351-002 PEG100 Penning Gauge; DN40CF-F
351-003 PEG100-D Penning Gauge; DN25KF
351-004 PEG100-D Penning Gauge; DN40CF-F
351-490 Spare Cathode Plate, set of 5 pcs


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