INFICON STRIPE™ CDG045DHS

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INFICON STRIPE™ CDG045DHS – HIGH SPEED CAPACITANCE DIAPHRAGM GAUGES

The Inficon STRIPE™ Capacitance Diaphragm Gauges are the fastest and highly accurate vacuum measurement instruments. Particularly, the CDG045DHS has the shortest response time within less than 2ms, combined with the EtherCAT fieldbus interface. The products are also designed with ultra-pure ceramic sensor that brings unique span stability throughout many years. The sensor is also proven temperature controlled, corrosion resistant, which helps maintain state-of-the-art zero stability.

The special sensor shield is prepared for Inficon STRIPE™ CDG045DHS to protect the gauge from undesired process by-products. The surface of the Inficon STRIPE instruments are kept cool, due to an innovative heating concept, and its unique speed capabilities, enabling an unprecedented productivity increase.

Advantages

High productivity – Faster than 2ms response time (FS > 50 mTorr)
Flexible integration – EtherCAT fieldbus
Long lifetime – Proven ceramic sensor
Forget recalibration – 90ppm/year full scale stability

Applications

Atomic layer deposition
High speed process control
PVD, CVD, Etch
General high temperature vacuum applications

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Specifications

Temperature effect
Type		1000Torr / 1100mbar … 0.05Torr / mbar	0.02 … 0.01Torr / mbar
Accuracy (1)	% of reading	0.15	–
Precision	% of reading	–	0.2
on zero 1000 … 1 Torr/mbar	percent FS/°C	0.0025	–
on zero 0.5 … 0.05 Torr/mbar	percent FS/°C	0.005	–
on zero 0.02 … 0.01 Torr	percent FS/°C	–	0.01
on span	% of reading / °C	0.01	0.01
Pressure max
P max 1000Torr / mbar	kPa (absolute)	400	400
P max 500 … 1Torr / mbar	kPa (absolute)	260	260
P max 0.5 … 0.01Torr / mbar	kPa (absolute)	130	130
Resolution	percent FS	0.003	0.003
Lowest reading	percent FS	0.01	0.01
Lowest suggested reading	percent FS	0.05	0.05
Lowest suggested control pressure	percent FS	0.5	0.5
Temperature
Operation (ambient)	°C	+10 … +40	+10 … +40
Bakeout at flange	°C	≤110	≤110
Storage	°C	–20 … +85	–20 … +85
Supply voltage		+14 … +30 VDC or ±15 V (±5%)	+14 … +30 VDC or ±15 V (±5%)
Power consumption
During Heat up	W	≤14	≤14
At operating temperature	W	≤9	≤9
Output signal (analog)	V (dc)	0 … +10	0 … +10
Measurement rate	kHz	1	1
Response time (2)	ms	2 … 20	2 … 20
Signal processing time	ms	2	2
Degree of protection		IP 30	IP 30
Standards
CE conformity	CE conformity	EN 61000‑6‑2/-6-3, EN 61010 & RoHS	EN 61000‑6‑2/-6-3, EN 61010 & RoHS
ETL certification	ETL certification	UL 61010‑1, CSA 22.2 No.61010‑1	UL 61010‑1, CSA 22.2 No.61010‑1
SEMI compliance	SEMI compliance	SEMI S2	SEMI S2
Electrical connection		D-sub, 15 pole, male	D-sub, 15 pole, male
Setpoint
Number of setpoints	Number of setpoints	2 (SP1,SP2)	2 (SP1,SP2)
Relay contact		≤30	≤30
Hysteresis	percent FS	1	1
Diagnostic port
Protocol	Protocol	USB	USB
Read	Read	pressure, status, ID	pressure, status, ID
Set	Set	set points, filter, zero adjust, factory reset, DC offset	set points, filter, zero adjust, factory reset, DC offset
Materials exposed to vacuum		Aluminum oxide ceramic (AI₂O₃), stainless steel (AISI 316L ⁽⁴⁾)	Aluminum oxide ceramic (AI₂O₃), stainless steel (AISI 316L ⁽⁴⁾)
Internal volume
I. volume 1/2” tube	cm³ (in.³)	4.2 (0.26)	4.2 (0.26)
I. volume DN 16 ISO KF	cm³ (in.³)	4.2 (0.26)	4.2 (0.26)
I. volume DN 16 CF-R	cm³ (in.³)	4.2 (0.26)	4.2 (0.26)
I. volume 8 VCR®	cm³ (in.³)	4.2 (0.26)	4.2 (0.26)
Weight
Weight 1/2” tube	g	837	837
Weight DN 16 ISO KF	g	852	852
Weight DN 16 CF-R	g	875	875
Weight 8 VCR®	g	897	897
EtherCAT
Protocol EtherCAT	Protocol EtherCAT	protocol specialized for EtherCAT	protocol specialized for EtherCAT
Communication standards	Communication standards	ETG.5003.1 S (R) V1.1.0 Common Device Profile ETG.5003.2080 S (R) V1.3.0 Specific Device Profile: Vacuum Gauge	ETG.5003.1 S (R) V1.1.0 Common Device Profile ETG.5003.2080 S (R) V1.3.0 Specific Device Profile: Vacuum Gauge
Node address	Node address	Explicit Device Identification	Explicit Device Identification
Physical layer	Physical layer	100BASE-Tx (IEEE 802.3)	100BASE-Tx (IEEE 802.3)
Digital functions read	Digital functions read	pressure, status, ID	pressure, status, ID
Digital functions set	Digital functions set	set points, filter, zero adjust, reset, DC offset	set points, filter, zero adjust, reset, DC offset
Mailbox (CoE)	Mailbox (CoE)	SDO requests, responses and information	SDO requests, responses and information
Process data	Process data	Fixed PDO mapping and configurable PDO mapping	Fixed PDO mapping and configurable PDO mapping
EtherCAT connector	EtherCAT connector	2 x RJ45, 8-pin (socket), IN and OUT	2 x RJ45, 8-pin (socket), IN and OUT
Cable	Cable	shielded Ethernet CAT5e or higher	shielded Ethernet CAT5e or higher
Cable length	m (ft.)	≤100 (330)	≤100 (330)
Signal processing time	ms	2	2

Meanings:

(1) Non-linearity, hysteresis, repeatability at 25 °C ambient operating temperature without temperature effects after 2 hours operation.
(2) Increase 10 … 90 percent FS

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