INFICON STRIPE™ CDG045DHS

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INFICON STRIPE™ CDG045DHS – HIGH SPEED CAPACITANCE DIAPHRAGM GAUGES

The Inficon STRIPE™ Capacitance Diaphragm Gauges are the fastest and highly accurate vacuum measurement instruments. Particularly, the CDG045DHS has the shortest response time within less than 2ms, combined with the EtherCAT fieldbus interface. The products are also designed with ultra-pure ceramic sensor that brings unique span stability throughout many years. The sensor is also proven temperature controlled, corrosion resistant, which helps maintain state-of-the-art zero stability.

The special sensor shield is prepared for Inficon STRIPE™ CDG045DHS to protect the gauge from undesired process by-products. The surface of the Inficon STRIPE instruments are kept cool, due to an innovative heating concept, and its unique speed capabilities, enabling an unprecedented productivity increase.

Advantages

  • High productivity – Faster than 2ms response time (FS > 50 mTorr)
  • Flexible integration – EtherCAT fieldbus
  • Long lifetime – Proven ceramic sensor
  • Forget recalibration – 90ppm/year full scale stability

Applications

  • Atomic layer deposition
  • High speed process control
  • PVD, CVD, Etch
  • General high temperature vacuum applications

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Specifications

Type 1000Torr / 1100mbar … 0.05Torr / mbar 0.02 … 0.01Torr / mbar
Accuracy (1) % of reading 0.15
Precision % of reading 0.2
Temperature effect
on zero 1000 … 1 Torr/mbar percent FS/°C 0.0025
on zero 0.5 … 0.05 Torr/mbar percent FS/°C 0.005
on zero 0.02 … 0.01 Torr percent FS/°C 0.01
on span % of reading / °C 0.01 0.01
Pressure max
P max 1000Torr / mbar kPa (absolute) 400 400
P max 500 … 1Torr / mbar kPa (absolute) 260 260
P max 0.5 … 0.01Torr / mbar kPa (absolute) 130 130
Resolution percent FS 0.003 0.003
Lowest reading percent FS 0.01 0.01
Lowest suggested reading percent FS 0.05 0.05
Lowest suggested control pressure percent FS 0.5 0.5
Temperature
Operation (ambient) °C +10 … +40 +10 … +40
Bakeout at flange °C ≤110 ≤110
Storage °C –20 … +85 –20 … +85
Supply voltage +14 … +30 VDC or ±15 V (±5%) +14 … +30 VDC or ±15 V (±5%)
Power consumption
During Heat up W ≤14 ≤14
At operating temperature W ≤9 ≤9
Output signal (analog) V (dc) 0 … +10 0 … +10
Measurement rate kHz 1 1
Response time (2) ms 2 … 20 2 … 20
Signal processing time ms 2 2
Degree of protection IP 30 IP 30
Standards
CE conformity CE conformity EN 61000‑6‑2/-6-3, EN 61010 & RoHS EN 61000‑6‑2/-6-3, EN 61010 & RoHS
ETL certification ETL certification UL 61010‑1, CSA 22.2 No.61010‑1 UL 61010‑1, CSA 22.2 No.61010‑1
SEMI compliance SEMI compliance SEMI S2 SEMI S2
Electrical connection D-sub, 15 pole, male D-sub, 15 pole, male
Setpoint
Number of setpoints Number of setpoints 2 (SP1,SP2) 2 (SP1,SP2)
Relay contact ≤30 ≤30
Hysteresis percent FS 1 1
Diagnostic port
Protocol Protocol USB USB
Read Read pressure, status, ID pressure, status, ID
Set Set set points, filter, zero adjust, factory reset, DC offset set points, filter, zero adjust, factory reset, DC offset
Materials exposed to vacuum Aluminum oxide ceramic (AI2O3), stainless steel (AISI 316L (4)) Aluminum oxide ceramic (AI2O3), stainless steel (AISI 316L (4))
Internal volume
I. volume 1/2” tube cm³ (in.³) 4.2 (0.26) 4.2 (0.26)
I. volume DN 16 ISO KF cm³ (in.³) 4.2 (0.26) 4.2 (0.26)
I. volume DN 16 CF-R cm³ (in.³) 4.2 (0.26) 4.2 (0.26)
I. volume 8 VCR® cm³ (in.³) 4.2 (0.26) 4.2 (0.26)
Weight
Weight 1/2” tube g 837 837
Weight DN 16 ISO KF g 852 852
Weight DN 16 CF-R g 875 875
Weight 8 VCR® g 897 897
EtherCAT
Protocol EtherCAT Protocol EtherCAT protocol specialized for EtherCAT protocol specialized for EtherCAT
Communication standards Communication standards ETG.5003.1 S (R) V1.1.0 Common Device Profile ETG.5003.2080 S (R) V1.3.0 Specific Device Profile: Vacuum Gauge ETG.5003.1 S (R) V1.1.0 Common Device Profile ETG.5003.2080 S (R) V1.3.0 Specific Device Profile: Vacuum Gauge
Node address Node address Explicit Device Identification Explicit Device Identification
Physical layer Physical layer 100BASE-Tx (IEEE 802.3) 100BASE-Tx (IEEE 802.3)
Digital functions read Digital functions read pressure, status, ID pressure, status, ID
Digital functions set Digital functions set set points, filter, zero adjust, reset, DC offset set points, filter, zero adjust, reset, DC offset
Mailbox (CoE) Mailbox (CoE) SDO requests, responses and information SDO requests, responses and information
Process data Process data Fixed PDO mapping and configurable PDO mapping Fixed PDO mapping and configurable PDO mapping
EtherCAT connector EtherCAT connector 2 x RJ45, 8-pin (socket), IN and OUT 2 x RJ45, 8-pin (socket), IN and OUT
Cable Cable shielded Ethernet CAT5e or higher shielded Ethernet CAT5e or higher
Cable length m (ft.) ≤100 (330) ≤100 (330)
Signal processing time ms 2 2

 

Meanings:

  • (1) Non-linearity, hysteresis, repeatability at 25 °C ambient operating temperature without temperature effects after 2 hours operation.
  • (2) Increase 10 … 90 percent FS

 

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