INFICON UL3000 Fab

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INFCON UL3000 FAB

Helium Leak Dectector

The INFICON UL3000 Fab is designed specially for helium leak testing in semiconductor applications. The instrument is attached the innovated ULTRATEST™ sensor technology. It provides flexibility, mobility, fast start up, high sensitivity, fast and precise test results, and reliability in helium testing.

Advantages

Save Time with I·CAL software algorithm for fast measurements in the range of 10^-9 to 10^-12 mbar·l/s
Minimize helium leak test efforts through quick evacuation and response time
Time saved by easy maneuverability through slim design
Low total cost of ownership (TCO) enabled by robust ion source (3 year warranty) and counterflow vacuum system
Easy to use, operator-guided HMI with full color high resolution rotatable display

Typical Applcation

Semiconductor Fabs
Flat Panel Display manufacturing
Solar Cell fabrication
Glass and Web (roll to roll) coating
General vacuum coating & applications

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Specification

UL3000 Fab

Max. pumping speed of roughing pump	m³/h	>30
Helium pumping speed (high sensitive mode ULTRA)	L/s	4
Dimensions (LxWxH)	mm in.	1050x472x987 42x21x34
Additional Features	Roots dry pump with highest air pumping speed, HYDRO·S, separate sniffer line port for SL3000, vacuum hose holder

UL3000 Fab ULTRA

Max. pumping speed of roughing pump	m³/h	>36
Helium pumping speed (high sensitive mode ULTRA)	L/s	4
Dimensions (LxWxH)	mm in.	1050x472x987 42x21x34
Additional Features	Roots dry pump with highest air pumping speed, HYDRO·S, separate sniffer line port for SL3000, vacuum hose holder

Part Number

Part Number	Description

550-260	UL3000 Fab ULTRA
550-200	UL3000 Fab

Accessories

Part Number	Description

551-010	Remote Control RC1000C, wired, with 4m coiled cable
551-202	Vaccuum Hose Holder for UL3000 Fab (incl. for ULTRA version)
525-001	SL3000-3, sniffer line 3 m length
525-002	SL3000-5, sniffer line 5 m length
525-003	SL3000-10, sniffer line 10 m length
551-203	Bracket for SL3000
551-210	SL200, Sniffer line + el. extension for UL3000
551-201	Helium Bottle Holder
560-310	I/O 1000 module
560-315	BM1000 Profibus module
560-316	BM1000 PROFINET IO module
560-317	BM1000 DeviceNet module
560-318	BM1000 Ethernet/IP module
560-334	Data Cable for IO1000,BM1000, 0.5m
560-332	Data Cable 2 m
560-335	Data Cable 5 m
560-340	Data Cable 10 m
551-005	TC1000Test Chamber,DN25KF,ESD wrist band
551-205	extension cable for TC1000/SL200, UL3000