INFICON SKY CDG025D

Trademark: Inficon
Origin: Đức


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THE CAPACITANCE DIAGRAMPH GAUGE – INFICON SKY CDG025D

The INFICON Sky CDG025D – Capacitance Diagramph Gauge – has a stable performance, even in difficult manufacturing tool environments. Thanks to the advanced digital electronics that innovate the gauge performance and provide more easy handling features. Moreover, the CDG025D is designed with the corrosion resistant ceramic for excellent zero stability with a long life expectancy of several million pressure cycles, including atmospheric bursts.

A specific shield covers the sensor and keeps the sensor safe from process contamination. Together with the dynamic design and digital electronic improve EMC compatibility, long term stability and temperature compensation. The Inficon CDG025D set the whole new standards for fast stability and fast recovery.

Advantages

  • Full scale ranges from 100 mTorr … 1000 Torr
  • Fast stability after power on
  • Fast recovery from atmospheric pressure
  • Corrosion resistant ceramic sensor
  • Excellent long term signal stability
  • Temperature compensated
  • Sensor protected from contamination
  • One pushbutton zero function
  • Wide range power supply

Applications

  • Semiconductor manufacturing equipment for Etch, CVD, PVD, ALD
  • Data storage and display manufacturing equipment
  • Industrial vacuum equipment
  • General high accuracy pressure measurement

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Specificaitions

Type 1000 Torr / 1100 mbar 500 … 10 Torr / mbar 1 Torr / mbar 0.25 Torr 0.1 Torr / mbar
Accuracy (1) % of reading 0.2 0.2 0.2 0.25 0.5
Temperature effect
on zero percent FS/°C 0.005 0.005 0.015 0.02 0.02
on span % of reading / °C 0.01 0.01 0.01 0.03 0.03
Resolution percent FS 0.003 0.003 0.003 0.003 0.003
Pressure, max. kPa (absolute) 400 260 260 130 130
Response time (2) ms 30 30 30 130 130
Lowest reading percent FS 0.01 0.01 0.01 0.01 0.01
Lowest suggested reading percent FS 0.05 0.05 0.05 0.05 0.05
Lowest suggested control pressure percent FS 0.5 0.5 0.5 0.5 0.5
Temperature
Operation (ambient) °C +5 … +50 +5 … +50 +5 … +50 +5 … +50 +5 … +50
Bakeout at flange (3) °C ≤110 ≤110 ≤110 ≤110 ≤110
Storage °C –40 … +65 –40 … +65 –40 … +65 –40 … +65 –40 … +65
Supply voltage V (dc) +14 … +30 +14 … +30 +14 … +30 +14 … +30 +14 … +30
Power consumption W ≤1 ≤1 ≤1 ≤1 ≤1
Output signal (analog) V (dc) 0 … +10 0 … +10 0 … +10 0 … +10 0 … +10
Degree of protection IP 30 IP 30 IP 30 IP 30 IP 30
Standards
CE conformity CE conformity EN 61000‑6‑2, EN 61000-6-3, EN 61010 & RoHS EN 61000‑6‑2, EN 61000-6-3, EN 61010 & RoHS EN 61000‑6‑2, EN 61000-6-3, EN 61010 & RoHS EN 61000‑6‑2, EN 61000-6-3, EN 61010 & RoHS EN 61000‑6‑2, EN 61000-6-3, EN 61010 & RoHS
ETL certification ETL certification UL 61010‑1, CSA 22.2 No.61010‑1 UL 61010‑1, CSA 22.2 No.61010‑1 UL 61010‑1, CSA 22.2 No.61010‑1 UL 61010‑1, CSA 22.2 No.61010‑1 UL 61010‑1, CSA 22.2 No.61010‑1
Electrical connection D-sub, 15 pole, male D-sub, 15 pole, male D-sub, 15 pole, male D-sub, 15 pole, male D-sub, 15 pole, male
Setpoint (4)
Number of setpoints Number of setpoints 2 (SP1,SP2) 2 (SP1,SP2) 2 (SP1,SP2) 2 (SP1,SP2) 2 (SP1,SP2)
Relay contact 30 30 30 30 30
Hysteresis percent FS 1 1 1 1 1
Materials exposed to vacuum Aluminum oxide ceramic (AI2O3), Vacon 70 (5), stainless steel (AISI 316L (6)), AgCuTi hard solder, sealing glass Aluminum oxide ceramic (AI2O3), Vacon 70 (5), stainless steel (AISI 316L (6)), AgCuTi hard solder, sealing glass Aluminum oxide ceramic (AI2O3), Vacon 70 (5), stainless steel (AISI 316L (6)), AgCuTi hard solder, sealing glass Aluminum oxide ceramic (AI2O3), Vacon 70 (5), stainless steel (AISI 316L (6)), AgCuTi hard solder, sealing glass Aluminum oxide ceramic (AI2O3), Vacon 70 (5), stainless steel (AISI 316L (6)), AgCuTi hard solder, sealing glass
Internal volume
1/2” tube cm³ (in.³) 3.6 (0.22)
DN 16 ISO KF cm³ (in.³) 3.6 (0.22)
DN 16 CF-R cm³ (in.³) 3.6 (0.22)
8 VCR® cm³ (in.³) 3.6 (0.22)
Weight
1/2” tube g 310
DN 16 ISO KF g 330
DN 16 CF-R g 350
8 VCR® g 370

 

Meanings:

  • (1) Non-linearity, hysteresis, repeatability at 25 °C ambient operating temperature without temperature effects after 2 hours operation.
  • (2) Increase 10 … 90 percent FS
  • (3) Non operation
  • (4) CDG025D-S only
  • (5) 28% Ni, 23% Co, 49% Fe
  • (6) 18% Cr, 10% Ni, 3% Mo, 69% Fe

 

 

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