INFICON SKY CDG025D

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Trademark: Inficon

Origin: Đức

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THE CAPACITANCE DIAGRAMPH GAUGE – INFICON SKY CDG025D

The INFICON Sky CDG025D – Capacitance Diagramph Gauge – has a stable performance, even in difficult manufacturing tool environments. Thanks to the advanced digital electronics that innovate the gauge performance and provide more easy handling features. Moreover, the CDG025D is designed with the corrosion resistant ceramic for excellent zero stability with a long life expectancy of several million pressure cycles, including atmospheric bursts.

A specific shield covers the sensor and keeps the sensor safe from process contamination. Together with the dynamic design and digital electronic improve EMC compatibility, long term stability and temperature compensation. The Inficon CDG025D set the whole new standards for fast stability and fast recovery.

Advantages

Full scale ranges from 100 mTorr … 1000 Torr
Fast stability after power on
Fast recovery from atmospheric pressure
Corrosion resistant ceramic sensor
Excellent long term signal stability
Temperature compensated
Sensor protected from contamination
One pushbutton zero function
Wide range power supply

Applications

Semiconductor manufacturing equipment for Etch, CVD, PVD, ALD
Data storage and display manufacturing equipment
Industrial vacuum equipment
General high accuracy pressure measurement

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Specificaitions

Temperature effect
Type		1000 Torr / 1100 mbar	500 … 10 Torr / mbar	1 Torr / mbar	0.25 Torr	0.1 Torr / mbar
Accuracy (1)	% of reading	0.2	0.2	0.2	0.25	0.5
on zero	percent FS/°C	0.005	0.005	0.015	0.02	0.02
on span	% of reading / °C	0.01	0.01	0.01	0.03	0.03
Resolution	percent FS	0.003	0.003	0.003	0.003	0.003
Pressure, max.	kPa (absolute)	400	260	260	130	130
Response time (2)	ms	30	30	30	130	130
Lowest reading	percent FS	0.01	0.01	0.01	0.01	0.01
Lowest suggested reading	percent FS	0.05	0.05	0.05	0.05	0.05
Lowest suggested control pressure	percent FS	0.5	0.5	0.5	0.5	0.5
Temperature
Operation (ambient)	°C	+5 … +50	+5 … +50	+5 … +50	+5 … +50	+5 … +50
Bakeout at flange (3)	°C	≤110	≤110	≤110	≤110	≤110
Storage	°C	–40 … +65	–40 … +65	–40 … +65	–40 … +65	–40 … +65
Supply voltage	V (dc)	+14 … +30	+14 … +30	+14 … +30	+14 … +30	+14 … +30
Power consumption	W	≤1	≤1	≤1	≤1	≤1
Output signal (analog)	V (dc)	0 … +10	0 … +10	0 … +10	0 … +10	0 … +10
Degree of protection		IP 30	IP 30	IP 30	IP 30	IP 30
Standards
CE conformity	CE conformity	EN 61000‑6‑2, EN 61000-6-3, EN 61010 & RoHS	EN 61000‑6‑2, EN 61000-6-3, EN 61010 & RoHS	EN 61000‑6‑2, EN 61000-6-3, EN 61010 & RoHS	EN 61000‑6‑2, EN 61000-6-3, EN 61010 & RoHS	EN 61000‑6‑2, EN 61000-6-3, EN 61010 & RoHS
ETL certification	ETL certification	UL 61010‑1, CSA 22.2 No.61010‑1	UL 61010‑1, CSA 22.2 No.61010‑1	UL 61010‑1, CSA 22.2 No.61010‑1	UL 61010‑1, CSA 22.2 No.61010‑1	UL 61010‑1, CSA 22.2 No.61010‑1
Electrical connection		D-sub, 15 pole, male	D-sub, 15 pole, male	D-sub, 15 pole, male	D-sub, 15 pole, male	D-sub, 15 pole, male
Setpoint (4)
Number of setpoints	Number of setpoints	2 (SP1,SP2)	2 (SP1,SP2)	2 (SP1,SP2)	2 (SP1,SP2)	2 (SP1,SP2)
Relay contact		30	30	30	30	30
Hysteresis	percent FS	1	1	1	1	1
Materials exposed to vacuum		Aluminum oxide ceramic (AI₂O₃), Vacon 70 ⁽⁵⁾, stainless steel (AISI 316L ⁽⁶⁾), AgCuTi hard solder, sealing glass	Aluminum oxide ceramic (AI₂O₃), Vacon 70 ⁽⁵⁾, stainless steel (AISI 316L ⁽⁶⁾), AgCuTi hard solder, sealing glass	Aluminum oxide ceramic (AI₂O₃), Vacon 70 ⁽⁵⁾, stainless steel (AISI 316L ⁽⁶⁾), AgCuTi hard solder, sealing glass	Aluminum oxide ceramic (AI₂O₃), Vacon 70 ⁽⁵⁾, stainless steel (AISI 316L ⁽⁶⁾), AgCuTi hard solder, sealing glass	Aluminum oxide ceramic (AI₂O₃), Vacon 70 ⁽⁵⁾, stainless steel (AISI 316L ⁽⁶⁾), AgCuTi hard solder, sealing glass
Internal volume
1/2” tube	cm³ (in.³)	3.6 (0.22)
DN 16 ISO KF	cm³ (in.³)	3.6 (0.22)
DN 16 CF-R	cm³ (in.³)	3.6 (0.22)
8 VCR®	cm³ (in.³)	3.6 (0.22)
Weight
1/2” tube	g	310
DN 16 ISO KF	g	330
DN 16 CF-R	g	350
8 VCR®	g	370

Meanings:

(1) Non-linearity, hysteresis, repeatability at 25 °C ambient operating temperature without temperature effects after 2 hours operation.
(2) Increase 10 … 90 percent FS
(3) Non operation
(4) CDG025D-S only
(5) 28% Ni, 23% Co, 49% Fe
(6) 18% Cr, 10% Ni, 3% Mo, 69% Fe