INFICON EDGE™ CDG045D2

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INFICON EDGE™ CDG045D2 – CAPACITANCE DIAPHRAGM GAUGE

The Inficon EDGE™ CDG045D2 is an appropriate instrument for the highly accurate vacuum measurement in harsh manufacturing environments. The CDG045D2 is designed with the ultra-pure ceramic sensor that brings unique span stability throughout many years. The sensor is also proven temperature controlled, corrosion resistant, which helps maintain state-of-the-art zero stability.

The special sensor shield is prepared for Inficon EDGE to protect the gauge from undesired process by-products. Advanced electronics offer a wide range of configurable signal conditioning for all applications and optional EtherCAT fieldbus interface. INFICON Edge is the smallest vacuum measurement instrument of its kind.

Advantages

  • Compact, saves valuable tool space
  • Easy integration, EtherCAT, wide variety of full scales and flanges, standard with two set points
  • Easy one push button or remote signal zero command, zero offset adjustable
  • Diagnostic port for quick service and maintenance
  • Two year warranty, longer life time with advanced heating concept and gauge protection
  • No long term recalibration due to excellent signal stability and repeatability, even in harsh plasma applications
  • Compliance & standards: CE, EN, UL, SEMI, RoHS

Applications

  • CVD, Etch, PVD and other semiconductor production processes

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Specification

Type1000 Torr, 1100 mbar500 … 1 Torr / mbar
Accuracy (1)% of reading0.150.15
Temperature effect
on zeropercent FS/°C0.00250.0025
on span% of reading / °C0.010.01
Pressure, max.kPa (absolute)400260
Resolutionpercent FS0.0030.003
Lowest readingpercent FS0.010.01
Lowest suggested readingpercent FS0.050.05
Lowest suggested control pressurepercent FS0.50.5
Temperature
Sensor°C4545
Operation (ambient)°C+10 … +40+10 … +40
Bakeout at flange°C≤110≤110
Storage°C–20 … +65–20 … +65
Supply voltage+14 … +30 VDC or ±15 V (±5%)+14 … +30 VDC or ±15 V (±5%)
Power consumption
During Heat upW≤15≤15
At operating temperatureW≤10≤10
Output signal (analog)V (dc)0 … +100 … +10
Response time (2)ms3030
Degree of protectionIP 40IP 40
Standards
CE conformityCE conformityEN 61000‑6‑2/-6-3, EN 61010 & RoHSEN 61000‑6‑2/-6-3, EN 61010 & RoHS
ETL certificationETL certificationUL 61010‑1, CSA 22.2 No.61010‑1UL 61010‑1, CSA 22.2 No.61010‑1
SEMI complianceSEMI complianceSEMI S2SEMI S2
Electrical connectionD-sub, 15 pole, maleD-sub, 15 pole, male
Setpoint
Number of setpointsNumber of setpoints2 (SP1,SP2)2 (SP1,SP2)
Relay contact≤30≤30
Hysteresispercent FS11
Diagnostic port
ProtocolProtocolRS232-CRS232-C
ReadReadpressure, status, IDpressure, status, ID
SetSetset points, filter, zero adjust, factory reset, DC offsetset points, filter, zero adjust, factory reset, DC offset
Materials exposed to vacuumAluminum oxide ceramic (AI2O3), stainless steel (AISI 316L (4))Aluminum oxide ceramic (AI2O3), stainless steel (AISI 316L (4))
Internal volume
I. volume 1/2” tubecm³ (in.³)4.2 (0.26)4.2 (0.26)
I. volume DN 16 ISO KFcm³ (in.³)4.2 (0.26)4.2 (0.26)
I. volume DN 16 CF-Rcm³ (in.³)4.2 (0.26)4.2 (0.26)
I. volume 8 VCR®cm³ (in.³)4.2 (0.26)4.2 (0.26)
Weight
Weight 1/2” tubeg837837
Weight DN 16 ISO KFg852852
Weight DN 16 CF-Rg875875
Weight 8 VCR® femaleg897897
EtherCAT
Protocol EtherCATProtocol EtherCATprotocol specialized for EtherCATprotocol specialized for EtherCAT
Communication standardsCommunication standardsETG.5003.1 S (R) V1.1.0 Common Device Profile ETG.5003.2080 S (R) V1.3.0 Specific Device Profile: Vacuum GaugeETG.5003.1 S (R) V1.1.0 Common Device Profile ETG.5003.2080 S (R) V1.3.0 Specific Device Profile: Vacuum Gauge
Data rateKbps100000100000
Node addressNode addressExplicit Device IdentificationExplicit Device Identification
Physical layerPhysical layer100BASE-Tx (IEEE 802.3)100BASE-Tx (IEEE 802.3)
Digital functions readDigital functions readpressure, status, IDpressure, status, ID
Digital functions setDigital functions setset points, filter, zero adjust, reset, DC offsetset points, filter, zero adjust, reset, DC offset
Process dataProcess dataFixed PDO mapping and configurable PDO mappingFixed PDO mapping and configurable PDO mapping
Mailbox (CoE)Mailbox (CoE)SDO requests, responses and informationSDO requests, responses and information
EtherCAT connectorEtherCAT connector2 x RJ45, 8-pin (socket), IN and OUT2 x RJ45, 8-pin (socket), IN and OUT
CableCableshielded Ethernet CAT5e or highershielded Ethernet CAT5e or higher
Cable lengthm (ft.)≤100 (330)≤100 (330)

 

Meanings:

  • (1) Non-linearity, hysteresis, repeatability at 25 °C ambient operating temperature without temperature effects after 2 hours operation.
  • (2) Increase 10 … 90 percent FS
  • (3) For pressure control type only
  • (4) 18% Cr, 10% Ni, 3% Mo, 69% Fe

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