INFICON EDGE™ CDG045D2

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INFICON EDGE™ CDG045D2 – CAPACITANCE DIAPHRAGM GAUGE

The Inficon EDGE™ CDG045D2 is an appropriate instrument for the highly accurate vacuum measurement in harsh manufacturing environments. The CDG045D2 is designed with the ultra-pure ceramic sensor that brings unique span stability throughout many years. The sensor is also proven temperature controlled, corrosion resistant, which helps maintain state-of-the-art zero stability.

The special sensor shield is prepared for Inficon EDGE to protect the gauge from undesired process by-products. Advanced electronics offer a wide range of configurable signal conditioning for all applications and optional EtherCAT fieldbus interface. INFICON Edge is the smallest vacuum measurement instrument of its kind.

Advantages

  • Compact, saves valuable tool space
  • Easy integration, EtherCAT, wide variety of full scales and flanges, standard with two set points
  • Easy one push button or remote signal zero command, zero offset adjustable
  • Diagnostic port for quick service and maintenance
  • Two year warranty, longer life time with advanced heating concept and gauge protection
  • No long term recalibration due to excellent signal stability and repeatability, even in harsh plasma applications
  • Compliance & standards: CE, EN, UL, SEMI, RoHS

Applications

  • CVD, Etch, PVD and other semiconductor production processes

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Specification

Type 1000 Torr, 1100 mbar 500 … 1 Torr / mbar
Accuracy (1) % of reading 0.15 0.15
Temperature effect
on zero percent FS/°C 0.0025 0.0025
on span % of reading / °C 0.01 0.01
Pressure, max. kPa (absolute) 400 260
Resolution percent FS 0.003 0.003
Lowest reading percent FS 0.01 0.01
Lowest suggested reading percent FS 0.05 0.05
Lowest suggested control pressure percent FS 0.5 0.5
Temperature
Sensor °C 45 45
Operation (ambient) °C +10 … +40 +10 … +40
Bakeout at flange °C ≤110 ≤110
Storage °C –20 … +65 –20 … +65
Supply voltage +14 … +30 VDC or ±15 V (±5%) +14 … +30 VDC or ±15 V (±5%)
Power consumption
During Heat up W ≤15 ≤15
At operating temperature W ≤10 ≤10
Output signal (analog) V (dc) 0 … +10 0 … +10
Response time (2) ms 30 30
Degree of protection IP 40 IP 40
Standards
CE conformity CE conformity EN 61000‑6‑2/-6-3, EN 61010 & RoHS EN 61000‑6‑2/-6-3, EN 61010 & RoHS
ETL certification ETL certification UL 61010‑1, CSA 22.2 No.61010‑1 UL 61010‑1, CSA 22.2 No.61010‑1
SEMI compliance SEMI compliance SEMI S2 SEMI S2
Electrical connection D-sub, 15 pole, male D-sub, 15 pole, male
Setpoint
Number of setpoints Number of setpoints 2 (SP1,SP2) 2 (SP1,SP2)
Relay contact ≤30 ≤30
Hysteresis percent FS 1 1
Diagnostic port
Protocol Protocol RS232-C RS232-C
Read Read pressure, status, ID pressure, status, ID
Set Set set points, filter, zero adjust, factory reset, DC offset set points, filter, zero adjust, factory reset, DC offset
Materials exposed to vacuum Aluminum oxide ceramic (AI2O3), stainless steel (AISI 316L (4)) Aluminum oxide ceramic (AI2O3), stainless steel (AISI 316L (4))
Internal volume
I. volume 1/2” tube cm³ (in.³) 4.2 (0.26) 4.2 (0.26)
I. volume DN 16 ISO KF cm³ (in.³) 4.2 (0.26) 4.2 (0.26)
I. volume DN 16 CF-R cm³ (in.³) 4.2 (0.26) 4.2 (0.26)
I. volume 8 VCR® cm³ (in.³) 4.2 (0.26) 4.2 (0.26)
Weight
Weight 1/2” tube g 837 837
Weight DN 16 ISO KF g 852 852
Weight DN 16 CF-R g 875 875
Weight 8 VCR® female g 897 897
EtherCAT
Protocol EtherCAT Protocol EtherCAT protocol specialized for EtherCAT protocol specialized for EtherCAT
Communication standards Communication standards ETG.5003.1 S (R) V1.1.0 Common Device Profile ETG.5003.2080 S (R) V1.3.0 Specific Device Profile: Vacuum Gauge ETG.5003.1 S (R) V1.1.0 Common Device Profile ETG.5003.2080 S (R) V1.3.0 Specific Device Profile: Vacuum Gauge
Data rate Kbps 100000 100000
Node address Node address Explicit Device Identification Explicit Device Identification
Physical layer Physical layer 100BASE-Tx (IEEE 802.3) 100BASE-Tx (IEEE 802.3)
Digital functions read Digital functions read pressure, status, ID pressure, status, ID
Digital functions set Digital functions set set points, filter, zero adjust, reset, DC offset set points, filter, zero adjust, reset, DC offset
Process data Process data Fixed PDO mapping and configurable PDO mapping Fixed PDO mapping and configurable PDO mapping
Mailbox (CoE) Mailbox (CoE) SDO requests, responses and information SDO requests, responses and information
EtherCAT connector EtherCAT connector 2 x RJ45, 8-pin (socket), IN and OUT 2 x RJ45, 8-pin (socket), IN and OUT
Cable Cable shielded Ethernet CAT5e or higher shielded Ethernet CAT5e or higher
Cable length m (ft.) ≤100 (330) ≤100 (330)

 

Meanings:

  • (1) Non-linearity, hysteresis, repeatability at 25 °C ambient operating temperature without temperature effects after 2 hours operation.
  • (2) Increase 10 … 90 percent FS
  • (3) For pressure control type only
  • (4) 18% Cr, 10% Ni, 3% Mo, 69% Fe

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