The Inficon EDGE™ CDG045D2 is an appropriate instrument for the highly accurate vacuum measurement in harsh manufacturing environments. The CDG045D2 is designed with the ultra-pure ceramic sensor that brings unique span stability throughout many years. The sensor is also proven temperature controlled, corrosion resistant, which helps maintain state-of-the-art zero stability.
The special sensor shield is prepared for Inficon EDGE to protect the gauge from undesired process by-products. Advanced electronics offer a wide range of configurable signal conditioning for all applications and optional EtherCAT fieldbus interface. INFICON Edge is the smallest vacuum measurement instrument of its kind.
Compact, saves valuable tool space
Easy integration, EtherCAT, wide variety of full scales and flanges, standard with two set points
Easy one push button or remote signal zero command, zero offset adjustable
Diagnostic port for quick service and maintenance
Two year warranty, longer life time with advanced heating concept and gauge protection
No long term recalibration due to excellent signal stability and repeatability, even in harsh plasma applications
Compliance & standards: CE, EN, UL, SEMI, RoHS
CVD, Etch, PVD and other semiconductor production processes
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