INFICON CUBE™ CDGSCI

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INFICON CUBE™ CDGSCI – Capacitance Diaphragm Instrument

The Inficon CUBE™ CDGsci is the high end capacitance diaphragm instrument. The gauge is highly accurate (≤ 0.025 % Rd accuracy; ≤ 50 ppm FS Repeatability) and stable (< 5 ppm FS/ °C temperature stability; < 70 ppm FS/ year long term stability). The Inficon CUBEis the most appropriate device to standardize vacuum measurement systems and is the only choice for vacuum research applications. The product is designed with ultra-pure ceramic sensor that brings unique span stability throughout many years. The sensor is also proven temperature controlled, corrosion resistant, which helps maintain state-of-the-art zero stability.

Cube sets new standards in modern communication and user flexibility with a 20 Bit analog output and RS232-C, TCP / IP and HTML digital output connected through wireless or wired Ethernet interface. Each device comes with a quality assurance certificate, hand-signed by the Cube’s leading product researchers

Advantages

True high precision pressure measurement – Ceramic technology
Full stable output – Proven by PTB
Flexible communication – Various modern interfaces
All functions integrated – No controller required
Direct mounting to chamber – Optimized center of gravity
Transportation without isolation valve possible

Applications

Transfer standard
Main reference gauge
Research
In-house standard

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Specifications

Temperature effect
Type		1000 Torr	100 … 1 Torr	100mTorr
Accuracy (1)	% of reading	0.025	0.025	0.05
on zero	percent FS/°C	0.0005	0.0005	0.005
on span	% of reading / °C	0.001	0.001	0.01
Pressure, max.	bar (absolute)	3	2.5	1.5
Lowest reading	percent FS	0.01	0.01	0.01
Lowest suggested reading	percent FS	0.05	0.05	0.05
Temperature
Operation (ambient)	°C	+10 … +40	+10 … +40	+10 … +40
Storage	°C	–10 … +50	–10 … +50	–10 … +50
Supply voltage		+14 … +30 VDC or ±15 V (±5%)	+14 … +30 VDC or ±15 V (±5%)	+14 … +30 VDC or ±15 V (±5%)
Power consumption
During Heat up	W	≤20	≤20	≤20
At operating temperature	W	≤17	≤17	≤17
Output signal (analog)	V (dc)	0 … +10	0 … +10	0 … +10
Response time (2)	ms	100	100	100
Degree of protection		IP 40	IP 40	IP 40
Standards
CE conformity	CE conformity	EN 61000‑6‑2/-6-3, EN 61010 & RoHS	EN 61000‑6‑2/-6-3, EN 61010 & RoHS	EN 61000‑6‑2/-6-3, EN 61010 & RoHS
ETL certification	ETL certification	UL 61010‑1, CSA 22.2 No.61010‑1	UL 61010‑1, CSA 22.2 No.61010‑1	UL 61010‑1, CSA 22.2 No.61010‑1
SEMI compliance	SEMI compliance	SEMI S2	SEMI S2	SEMI S2
Electrical connection		D-sub, 15 pole, male; 2 x LEMO Coax; Ethernet FCC	D-sub, 15 pole, male; 2 x LEMO Coax; Ethernet FCC	D-sub, 15 pole, male; 2 x LEMO Coax; Ethernet FCC
Setpoint
Number of setpoints	Number of setpoints	2 (SP1,SP2)	2 (SP1,SP2)	2 (SP1,SP2)
Relay contact		≤30	≤30	≤30
Hysteresis	percent FS	1	1	1
Diagnostic port
Protocol	Protocol	Web pages, REST services, RS232-ASCII	Web pages, REST services, RS232-ASCII	Web pages, REST services, RS232-ASCII
Read	Read	pressure, status, ID	pressure, status, ID	pressure, status, ID
Set	Set	set points, filter, zero adjust, factory reset, DC offset	set points, filter, zero adjust, factory reset, DC offset	set points, filter, zero adjust, factory reset, DC offset
Materials exposed to vacuum		Aluminum oxide ceramic (AI₂O₃), stainless steel (AISI 316L ⁽³⁾)	Aluminum oxide ceramic (AI₂O₃), stainless steel (AISI 316L ⁽³⁾)	Aluminum oxide ceramic (AI₂O₃), stainless steel (AISI 316L ⁽³⁾)
Internal volume
I. volume DN 16 ISO KF	cm³ (in.³)	4.2 (0.26)	4.2 (0.26)	4.2 (0.26)
I. volume DN 16 CF-R	cm³ (in.³)	4.2 (0.26)	4.2 (0.26)	4.2 (0.26)
I. volume 8 VCR®	cm³ (in.³)	4.2 (0.26)	4.2 (0.26)	4.2 (0.26)
Weight
Weight DN 16 ISO KF	g	1670	1670	1670
Weight DN 16 CF-R	g	1670	1670	1670
Weight 8 VCR®	g	1670	1670	1670

Meanings:

(1) Non-linearity, hysteresis, repeatability at 25 °C ambient operating temperature without temperature effects after 2 hours operation.
(2) Increase 10 … 90 percent FS
(3) 18% Cr, 10% Ni, 3% Mo, 69% Fe