INFICON STRIPE™ CDG045DHS

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INFICON STRIPE™ CDG045DHS – HIGH SPEED CAPACITANCE DIAPHRAGM GAUGES

The Inficon STRIPE™ Capacitance Diaphragm Gauges are the fastest and highly accurate vacuum measurement instruments. Particularly, the CDG045DHS has the shortest response time within less than 2ms, combined with the EtherCAT fieldbus interface. The products are also designed with ultra-pure ceramic sensor that brings unique span stability throughout many years. The sensor is also proven temperature controlled, corrosion resistant, which helps maintain state-of-the-art zero stability.

The special sensor shield is prepared for Inficon STRIPE™ CDG045DHS to protect the gauge from undesired process by-products. The surface of the Inficon STRIPE instruments are kept cool, due to an innovative heating concept, and its unique speed capabilities, enabling an unprecedented productivity increase.

Advantages

  • High productivity – Faster than 2ms response time (FS > 50 mTorr)
  • Flexible integration – EtherCAT fieldbus
  • Long lifetime – Proven ceramic sensor
  • Forget recalibration – 90ppm/year full scale stability

Applications

  • Atomic layer deposition
  • High speed process control
  • PVD, CVD, Etch
  • General high temperature vacuum applications

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Specifications

Type1000Torr / 1100mbar … 0.05Torr / mbar0.02 … 0.01Torr / mbar
Accuracy (1)% of reading0.15–
Precision% of reading–0.2
Temperature effect
on zero 1000 … 1 Torr/mbarpercent FS/°C0.0025–
on zero 0.5 … 0.05 Torr/mbarpercent FS/°C0.005–
on zero 0.02 … 0.01 Torrpercent FS/°C–0.01
on span% of reading / °C0.010.01
Pressure max
P max 1000Torr / mbarkPa (absolute)400400
P max 500 … 1Torr / mbarkPa (absolute)260260
P max 0.5 … 0.01Torr / mbarkPa (absolute)130130
Resolutionpercent FS0.0030.003
Lowest readingpercent FS0.010.01
Lowest suggested readingpercent FS0.050.05
Lowest suggested control pressurepercent FS0.50.5
Temperature
Operation (ambient)°C+10 … +40+10 … +40
Bakeout at flange°C≤110≤110
Storage°C–20 … +85–20 … +85
Supply voltage+14 … +30 VDC or ±15 V (±5%)+14 … +30 VDC or ±15 V (±5%)
Power consumption
During Heat upW≤14≤14
At operating temperatureW≤9≤9
Output signal (analog)V (dc)0 … +100 … +10
Measurement ratekHz11
Response time (2)ms2 … 202 … 20
Signal processing timems22
Degree of protectionIP 30IP 30
Standards
CE conformityCE conformityEN 61000‑6‑2/-6-3, EN 61010 & RoHSEN 61000‑6‑2/-6-3, EN 61010 & RoHS
ETL certificationETL certificationUL 61010‑1, CSA 22.2 No.61010‑1UL 61010‑1, CSA 22.2 No.61010‑1
SEMI complianceSEMI complianceSEMI S2SEMI S2
Electrical connectionD-sub, 15 pole, maleD-sub, 15 pole, male
Setpoint
Number of setpointsNumber of setpoints2 (SP1,SP2)2 (SP1,SP2)
Relay contact≤30≤30
Hysteresispercent FS11
Diagnostic port
ProtocolProtocolUSBUSB
ReadReadpressure, status, IDpressure, status, ID
SetSetset points, filter, zero adjust, factory reset, DC offsetset points, filter, zero adjust, factory reset, DC offset
Materials exposed to vacuumAluminum oxide ceramic (AI2O3), stainless steel (AISI 316L (4))Aluminum oxide ceramic (AI2O3), stainless steel (AISI 316L (4))
Internal volume
I. volume 1/2” tubecm³ (in.³)4.2 (0.26)4.2 (0.26)
I. volume DN 16 ISO KFcm³ (in.³)4.2 (0.26)4.2 (0.26)
I. volume DN 16 CF-Rcm³ (in.³)4.2 (0.26)4.2 (0.26)
I. volume 8 VCR®cm³ (in.³)4.2 (0.26)4.2 (0.26)
Weight
Weight 1/2” tubeg837837
Weight DN 16 ISO KFg852852
Weight DN 16 CF-Rg875875
Weight 8 VCR®g897897
EtherCAT
Protocol EtherCATProtocol EtherCATprotocol specialized for EtherCATprotocol specialized for EtherCAT
Communication standardsCommunication standardsETG.5003.1 S (R) V1.1.0 Common Device Profile ETG.5003.2080 S (R) V1.3.0 Specific Device Profile: Vacuum GaugeETG.5003.1 S (R) V1.1.0 Common Device Profile ETG.5003.2080 S (R) V1.3.0 Specific Device Profile: Vacuum Gauge
Node addressNode addressExplicit Device IdentificationExplicit Device Identification
Physical layerPhysical layer100BASE-Tx (IEEE 802.3)100BASE-Tx (IEEE 802.3)
Digital functions readDigital functions readpressure, status, IDpressure, status, ID
Digital functions setDigital functions setset points, filter, zero adjust, reset, DC offsetset points, filter, zero adjust, reset, DC offset
Mailbox (CoE)Mailbox (CoE)SDO requests, responses and informationSDO requests, responses and information
Process dataProcess dataFixed PDO mapping and configurable PDO mappingFixed PDO mapping and configurable PDO mapping
EtherCAT connectorEtherCAT connector2 x RJ45, 8-pin (socket), IN and OUT2 x RJ45, 8-pin (socket), IN and OUT
CableCableshielded Ethernet CAT5e or highershielded Ethernet CAT5e or higher
Cable lengthm (ft.)≤100 (330)≤100 (330)
Signal processing timems22

 

Meanings:

  • (1) Non-linearity, hysteresis, repeatability at 25 °C ambient operating temperature without temperature effects after 2 hours operation.
  • (2) Increase 10 … 90 percent FS

 

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